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GaN Substrates for III-Nitride Devices

机译:用于III族氮化物器件的GaN衬底

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摘要

Despite the rapid commercialization of III-nitride semiconductor devices for applications in visible and ultraviolet optoelectronics and in high-power and high-frequency electronics, their full potential is limited by two primary obstacles: i) a high defect density and biaxial strain due to the heteroepitaxial growth on foreign substrates, which result in lower performance and shortened device lifetime, and ii) a strong built-in electric field due to spontaneous and piezoelectric polarization in the wurtzite structures along the well-established [0001] growth direction for nitrides. Recent advances in the research, development, and commercial production of native GaN substrates with low defect density and high structural and optical quality have opened opportunities to overcome both of these obstacles and have led to significant progress in the development of several opto-electronic and high-power devices. In this paper, the recent achievements in bulk GaN growth development using different approaches are reviewed; comparison of the bulk materials grown in different directions is made; and the current achievements in device performance utilizing native GaN substrate material are summarized.
机译:尽管III族氮化物半导体器件已迅速商业化,用于可见光和紫外光电子学以及高功率和高频电子学中,但是它们的全部潜力受到两个主要障碍的限制:i)高缺陷密度和双轴应变由于在异质衬底上进行异质外延生长,这会导致性能降低和器件寿命缩短,并且ii)由于纤锌矿结构中沿良好确立的[0001]生长方向的自发和压电极化,因此产生了强大的内置电场。具有低缺陷密度,高结构和光学质量的天然GaN衬底在研究,开发和商业生产方面的最新进展为克服这两个障碍打开了机遇,并导致了数种光电和高性能GaN的开发取得重大进展。电源设备。本文回顾了使用不同方法在块状GaN生长中取得的最新成就。比较了沿不同方向生长的散装物料;总结了利用天然GaN衬底材料在器件性能方面的最新成就。

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